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| 论文题目 |
ZnO thin film piezoelectric micromachined microphone with symmetric composite vibrating diaphragm |
| 论文题目（英文） |
ZnO thin film piezoelectric micromachined microphone with symmetric composite vibrating diaphragm |
| 作者 |
李俊红 |
| 发表年度 |
2017 |
| 卷 |
26 |
| 期 |
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| 页码 |
055033 |
| 期刊名称 |
Smart Materials and Structures |
| 摘要 |
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| 摘要_英文 |
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