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| 论文题目 |
Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film |
| 论文题目（英文） |
Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film |
| 作者 |
李俊红 |
| 发表年度 |
2017 |
| 卷 |
17 |
| 期 |
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| 页码 |
1381 |
| 期刊名称 |
Sensors |
| 摘要 |
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| 摘要_英文 |
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