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论文题目 |
ZnO薄膜体声波谐振器性能分析和研制 |
论文题目(英文) |
Development and Analysis of a ZnO Film Bulk Acoustic Resonator |
作者 |
汤亮 |
发表年度 |
2008 |
卷 |
30 |
期 |
4 |
页码 |
387-389 |
期刊名称 |
压电与声光 |
摘要 |
采用射频网络法分析了 ZnO 薄膜体声波谐振器的谐振特性 ,并考虑了介质声损耗对品质因数 Q值的影响。采用硅体刻蚀工艺在硅基片上制备了以 ZnO 薄膜为压电膜的薄膜体声波谐振器 ,并对器件的性能进行了测试。将实验与理论分析结果进行对比 ,发现实验器件的谐振频率与理论值一致 ,但器件 Q值却比理论值低,进一步的分析揭示了实际器件 Q值偏低的原因。 关键词:滤波器;双工器;振荡器;射频微机电系统;薄膜体声波谐振器 |
摘要_英文 |
Resonant properties of a ZnO film bulk acoustic resonator (FBAR) was analyzied based on RF net work method. The at tenuation of the acoustic media was also taken into account for Qevaluation. Some FBAR samples were developed by using micromachining silicon processes. They were also tested and measured. It was found that the measured resonant frequencies were in agreement with the theoretical predictions , but the measured Q was much lower . Further investigations revealed the factors which could affect Q of the devices. Key words : filter ;duplexer ;oscillator ;RF MEMS ; FBAR |
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