论文题目 |
ST-X石英基片上铬栅阵中单根栅条反射系数实验研究 |
论文题目(英文) |
Experimental study on the reflection coefficient of chromium gratings strip on a ST-X quartz |
作者 |
王一骝 |
发表年度 |
2008 |
卷 |
27 |
期 |
4 |
页码 |
294 |
期刊名称 |
应用声学 |
摘要 |
精确的栅条反射系数对于声表面波器件的设计至关重要。本文利用网络分析仪的时域功能,采用短脉冲方法实验研究了ST—X石英基片上铬栅阵中单根栅条的反射系数。并推导出计算反射系数的公式。实验测量了不同铬膜厚度条件下单根指条的反射系数,再对实验结果作最小方差法拟合,得到反射系数随铬膜厚度变化的表达式,即反射系数中压电短路贡献和铬的力学负载贡献之和。最后将实验结果与采用有限元方法计算的理论结果比较,发现两者基本吻合。 关键词:反射系数,栅条,短脉冲法 |
摘要_英文 |
The strip reflection coefficient,which includes not only amplitude information but also phase information,is a key parameter in Surface Acoustic Wave(SAW)device design.In this paper,the experimental study on the reflection coefficient of chromium atings strip is implemented on using the impulse response method with the aid of network analyzer time function.The reflection coefficient experimental expression is derived first.Then.experiments are implemented to measure reflection coefficientswith different chrorniam strip thickness.Finally,by means of minimum variance cunre fitting method,the relationship of the reflection coefficient v.S.chromium thickness is obtained,which shows that both piezoelectric short circuitingand mass loading contributions to the reflection coefficient is determined.Experimental result agrees well with theoretical result by Finite Element Method(FEM). Key words:Reflection coefficient,Grating strip,Impulse
response method |