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| 论文题目 |
Fast calculate the parameters of surface acoustic wave coupling-of-modes model |
| 论文题目（英文） |
Fast calculate the parameters of surface acoustic wave coupling-of-modes model |
| 作者 |
刘建生 |
| 发表年度 |
2007 |
| 卷 |
26 |
| 期 |
3 |
| 页码 |
269 |
| 期刊名称 |
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| 摘要 |
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| 摘要_英文 |
Accurate solutions of acoustic waves in piezoelectric substrate and metal film as layered structure were obtained. Phase velocity, electromechanical coupling coefficient and static capacitance were calculated based upon the solutions. Chen and Haus' theory was used to analyze surface acoustic waves in shorten gratings with single finger every period and a reflection coefficient expression of one strip was presented. Parameters of aluminum on X112°Y LiTaO3 and gold on ST-quartz were calculated. The results agreed well with those from Ken-ya Hashimoto's theory. The reflection coefficient of gold on ST-quartz was measured to verify the theoretical result. |
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